JPH0721458Y2 - ウエハ搬送アーム - Google Patents
ウエハ搬送アームInfo
- Publication number
- JPH0721458Y2 JPH0721458Y2 JP1989127985U JP12798589U JPH0721458Y2 JP H0721458 Y2 JPH0721458 Y2 JP H0721458Y2 JP 1989127985 U JP1989127985 U JP 1989127985U JP 12798589 U JP12798589 U JP 12798589U JP H0721458 Y2 JPH0721458 Y2 JP H0721458Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- suction
- arm body
- transfer arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 28
- 239000000853 adhesive Substances 0.000 claims description 26
- 230000001070 adhesive effect Effects 0.000 claims description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 239000010453 quartz Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 72
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127985U JPH0721458Y2 (ja) | 1989-10-31 | 1989-10-31 | ウエハ搬送アーム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127985U JPH0721458Y2 (ja) | 1989-10-31 | 1989-10-31 | ウエハ搬送アーム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0366928U JPH0366928U (en]) | 1991-06-28 |
| JPH0721458Y2 true JPH0721458Y2 (ja) | 1995-05-17 |
Family
ID=31675718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989127985U Expired - Lifetime JPH0721458Y2 (ja) | 1989-10-31 | 1989-10-31 | ウエハ搬送アーム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721458Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4494871B2 (ja) * | 2004-05-28 | 2010-06-30 | 新日本製鐵株式会社 | 赤熱鋼板の吸引式搬送装置 |
| JP6742849B2 (ja) * | 2016-07-29 | 2020-08-19 | 株式会社アルバック | 基板搬送ロボット、真空処理装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3910620A (en) * | 1974-04-15 | 1975-10-07 | American Chain & Cable Co | High temperature vacuum pad lift |
| JPS5314350A (en) * | 1976-07-27 | 1978-02-08 | Mitsubishi Electric Corp | Current detector |
| JPS6395241U (en]) * | 1986-12-12 | 1988-06-20 | ||
| JPS63160222A (ja) * | 1986-12-23 | 1988-07-04 | Mitsubishi Electric Corp | ウエハホルダ |
| JPH0511992Y2 (en]) * | 1987-10-16 | 1993-03-25 |
-
1989
- 1989-10-31 JP JP1989127985U patent/JPH0721458Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0366928U (en]) | 1991-06-28 |
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